Technique for Monitoring and Controlling A PLasma Process

ABSTRACT

A time-of-flight ion sensor for monitoring ion species in a plasma includes a housing. A drift tube is positioned in the housing. An extractor electrode is positioned in the housing at a first end of the drift tube so as to attract ions from the plasma. A plurality of electrodes is positioned at a first end of the drift tube proximate to the extractor electrode. The plurality of electrodes is biased so as to selectively attract ions to enter the drift tube and to drift towards a second end of the drift tube. An ion detector is positioned proximate to the second end of the drift tube. The ion detector detects arrival times associated with the at least the portion of the attracted ions.

PRIORITY

This patent application is a continuation application of and claimspriority to U.S. patent application Ser. No. 11/678,524, filed on Feb.23, 2007, and entitled “Technique for Monitoring and Controlling aPlasma Process,” which is a continuation-in-part application of claimspriority to U.S. patent application Ser. No. 11/371,907, filed on Mar.10, 2006 and entitled “Technique for Monitoring and Controlling a PlasmaProcess.” Each of U.S. patent application Ser. Nos. 11/678,524 and11/371,907 is incorporated in entirety by reference.

BACKGROUND

Plasma processes are widely used in semiconductor manufacturing, forexample, to implant wafers with various dopants, to deposit or to etchthin films. In order to achieve predictable and repeatable processresults, it is critical to closely monitor and control the plasmacharacteristics. For example, studies of plasma doping (PLAD) processeshave shown that ion composition of a plasma may be a critical piece ofinformation that determines dopant species, dopant depth profiles,process-related contamination, etc. The ion composition changes withPLAD process parameters such as gas ratio, total gas pressure, anddischarge power. The ion composition can also change significantlydepending on the conditioning status of a plasma chamber. Therefore, itis important to know the ion composition during a PLAD process,preferably in situ and in real-time, in order to achieve repeatable andpredictable process results.

Existing plasma tools often lack the capability of providing detailedreal-time information (e.g., ion composition) of a plasma. In a typicalPLAD process, for example, a plasma is controlled by monitoring animplant dose based on a Faraday cup current. However, a Faraday cup isjust a total charge counter, which does not distinguish differentcharged particles or otherwise offer any insight of the plasmaproperties. Although in-situ mass analysis has been employed in sometraditional beam-line ion implantation systems, it has typically beenavoided in plasma-based ion implantation systems in order to achieve ahigh throughput.

In addition, conventional ion sensors, such as commercial mass/energyanalyzers and quadrapole mass spectrometers, are often too bulky and/ortoo intrusive to implement in production tools. Large ion sensors tendto perturb a plasma under measurement and therefore distort the processresults. Furthermore, the size and weight of conventional ion sensorsoften limit their deployment options in a semiconductor process tool.Furthermore, in pulsed plasma processing wherein a plasma alternatesbetween on and off states, time-resolved measurements of the plasma areoften required. However, few existing ion sensors provide the capabilityof time-resolved measurements.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to facilitate a fuller understanding of the present disclosure,reference is now made to the accompanying drawings, in which likeelements are referenced with like numerals. These drawings should not beconstrued as limiting the present disclosure, but are intended to beexemplary only.

FIG. 1 shows an exemplary ion sensor in accordance with an embodiment ofthe present disclosure.

FIG. 2 shows an ion sensor having one exemplary configuration inaccordance with an embodiment of the present disclosure.

FIG. 2 a shows an ion sensor having an energy analyzer in accordancewith an embodiment of the present disclosure.

FIG. 3 shows an ion sensor having another exemplary configuration inaccordance with an embodiment of the present disclosure.

FIG. 4 shows an ion sensor having yet another exemplary configuration inaccordance with an embodiment of the present disclosure.

FIG. 5 shows one installation option for an ion sensor in accordancewith an embodiment of the present disclosure.

FIG. 6 shows another installation option for an ion sensor in accordancewith an embodiment of the present disclosure.

FIGS. 6 a-c show different examples of plasma processing chambers inaccordance with embodiments of the present disclosure.

FIG. 7 shows yet another installation option for an ion sensor inaccordance with an embodiment of the present disclosure.

FIGS. 7 a-b show exemplary systems for employing ion sensors for processcontrol in accordance with embodiments of the present disclosure.

FIG. 8 shows an exemplary ion sensor in accordance with an embodiment ofthe present disclosure.

DETAILED DESCRIPTION

The present disclosure will now be described in more detail withreference to exemplary embodiments thereof as shown in the accompanyingdrawings. While the present disclosure is described below with referenceto exemplary embodiments, it should be understood that the presentdisclosure is not limited thereto. Those of ordinary skill in the arthaving access to the teachings herein will recognize additionalimplementations, modifications, and embodiments, as well as other fieldsof use, which are within the scope of the present disclosure asdescribed herein, and with respect to which the present disclosure maybe of significant utility.

Embodiments of the present disclosure provide a number of compactdesigns of time-of-flight (TOF) ion sensors that are suitable forin-situ monitoring and controlling of a plasma process. These designsmay employ flexible ion extraction and ion focusing techniques tomeasure ion composition in a plasma chamber. Each TOF ion sensor may beinstalled in a variety of ways in the plasma chamber and may beconfigured for a number of functions such as, for example, in-situprocess control, chamber readiness verification, fault detection,implant dose correction, and implant uniformity measurement. Thesensitivity and size of each ion sensor may allow time-resolvedmeasurement and spatial measurement of a plasma.

Referring to FIG. 1, there is shown an exemplary ion sensor 100 inaccordance with an embodiment of the present disclosure. In someembodiments, the ion sensor 100 includes an ionization source 101 thatgenerates ions proximate to the entrance of the ion sensor 100. In oneembodiment, the ion source 101 generates an electron cloud using a lowenergy electron source. The electrons in the electron cloud causeelectron impact that facilitates the ionization of neutral atoms andmolecules and the conversion of ions by electron attachment. In variousother embodiments, the ion source 101 generates ions proximate to theentrance of the ion sensor 100 by ion-impact and/or by photon-impactionization. The ion source 101 can be a continuous or a pulsed ionsource. The ion source 101 is useful for some applications where it isdesirable to provide conventional RGA type measurements of the neutralgas or fast neutral species.

Ion sensor 100 comprises a housing 102 that may be adapted forinstallation in a view port of a plasma chamber and that may accommodatedifferential pumping. The housing 102 may be individually biased at adesired potential V.sub.housing. A left hand side of the housing 102 maybe referred to as an “extractor side” since ions extracted from a plasmaenter the ion sensor 100 via an aperture (“housing aperture”) on theleft hand side of the housing 102. A right hand side of the housing 102may be referred to as a “detector side” since ion detection takes placeon the right hand side of the housing 102.

The ion sensor 100 includes a drift tube 104 inside the housing 102which may also be individually biased, for example, at a desiredpotential V.sub.L3. The drift tube 104 typically has a hollow space witha negligible electromagnetic field. An extractor side of the drift tube104 may have an aperture (“drift tube aperture”) for admitting ions. Adetector side of the drift tube 104 may have a grid 124 that allows ionsto exit while shielding out external electric fields. The plasmachamber's pressure is typically 1-3,000 mTorr, while the drift tubepressure is typically at 2.times.10.sup.−6 Torr or less. Differentialpumping can be used to maintain the pressure difference.

Various embodiments include one or more electrodes and/or grids thatform lenses or deflectors proximate to the extractor side of the drifttube 104, between the housing aperture and the drift tube aperture. Insome embodiments, there are a series of electrodes for extracting andfocusing ions. For example, there may be an extractor electrode 106proximate to the housing aperture. The extractor electrode 106 may havean aperture that is between 10 and 500 microns in diameter (preferable50-200 microns for some embodiments), although the actual aperture sizemay vary, at least in part, on the differential pumping requirements.The extractor electrode 106 may be biased at a suitable potentialV.sub.extractor in order to attract either positive or negative ionsfrom a plasma. The attracted ions may be traveling at diverse angles.

To ensure that the attracted ions travel towards the detector sidewithin a finite beam angle (e.g., equal or less than .+−.1.5 degrees),two or more electrodes (e.g., electrostatic lenses 108 and 110) may bearranged in series with their apertures aligned with those of thehousing 102, the extractor 106, and the drift tub 104. Eachelectrostatic lens may be individually biased to create a desiredelectrostatic field that directs the ions in a focused beam. In variousmodes of operation, the electrostatic lenses are biased with either apositive or a negative voltage. One of the electrostatic lenses may beprovided with a voltage pulse to admit a portion (or packet) of theattracted ions into the drift tube 104. The voltage pulse may berepeated in a timed manner for a periodical or near-continuous samplingof the ions.

In various embodiments, a combination of a repeller voltage and anextraction voltage pulse is applied to any pair of electrodes to drivespositive ions into the drift tube 104. The flight time of the ions isdetermined relative to the time at which the extraction pulse occurs.For example, in one embodiment, the electrostatic lens 108 is biasedwith a positive voltage pulse V.sub.L1. The positive voltage pulse canbe periodic or non-periodic. The electrostatic lens 110 is biased at apositive repelling voltage V.sub.L2. In one embodiment, a positiverepeller voltage is applied to electrostatic lens 110 and a positivevoltage pulse is applied to the nearby electrostatic lens 108 in orderto drive positive ions past the repeller electrodes and into the drifttube 104. The positive repeller voltage may be periodic or not. Thedrift tube 104, when biased at V.sub.L3, may function as a thirdelectrostatic lens in the series. The bias voltage on the drift tube maybe a pulsed voltage. Negative ions may be extracted into the drift tubeusing a similar arrangement.

In some embodiments, voltage pulses are applied to more than one of theelectrodes. For example voltage pulses can be applied to at least two ofthe drift tube 104, the extractor 106, the electrostatic lens 108, andthe electrostatic lens 110. The at least two voltage pulses can beapplied either simultaneously or delayed by a predetermined time inorder to cause ions to enter the drift tube.

In some embodiments, a blocking voltage is applied to at least one ofthe extractor 106, the electrostatic lens 108, and the electrostaticlens 110 in order to effectively prevent ions from traveling into thedrift tube 104. In some methods of operation, the magnitude of theblocking voltage is periodically varied in order to allow some ions toenter the drift tube. The flight time of the ions through the drift tube104 is determined relative to the time at which this voltage is changed.

Once admitted into the drift tube 104, the ions drift towards thedetector end virtually unaffected by any electric field. The ionstypically have the same kinetic energy. Heavy ions travel relativelyslow and light ions travel relatively fast. Given a sufficient flighttime (i.e., sufficient length of the drift tube 104), the ions becomeseparated into individual packets based on ion mass of their ionicspecies.

In some embodiments, the transmission of ions (positive or negative)through the drift tube is modulated using an arrangement of quadrupoleelements. In one embodiment, the modulation is periodic. In anotherembodiment, the modulation is non-periodic. Modulation may beaccomplished by varying the RF or DC voltages associated with theindividual quadrupole elements. In these embodiments, the flight time ofthe ions is determined relative to the time at which the modulationoccurs.

In various other embodiments, the transmission of ions (positive ornegative) through the drift tube can be modulated by numerous othermeans. For example, the transmission of ions can be modulated byelectrostatic deflection of the ions. The transmission of ions can alsobe modulated by a mechanical means such as a mechanical gating,multi-stage chopper, or any other type of mechanical interrupter. Forexample, in one embodiment, the mechanical interrupter is a mechanicalshutter. Modulation by mechanical means is sometimes advantageous forlow energy applications. In these embodiments, the flight time of theions is also determined relative to the time at which the modulationoccurs.

On the detector side, a detector assembly 112 may be used to detect theions. The detector assembly 112 may be any type of commerciallyavailable or customized ion detection device (e.g., micro-channel plate(MCP) assembly). Detection and/or collection of the ions may becontrolled, for example, with one or more voltage biases such asV.sub.MCP. The detector assembly 112 may be coupled to a pre-amplifier118 that is in turn coupled to a processor unit 122 via an electronicinterface 120. The electronic interface 120 may be, for example, a fastdata acquisition card. The processor unit 122 may be, for example, apersonal computer (PC) or an industrial type of computing device.

The individual ion packets having distinct ion mass numbers are detectedsequentially by the detector. The detected signals are amplified by thepre-amplifier 118. The amplified signals are then processed by theprocessor unit 122. Signals corresponding to each individual packetproduce a mass peak in a mass spectrum. The mass spectrum accuratelyreflects an ion composition of the plasma based on one or more samplingsof ion species from the plasma.

In some embodiments, the detector assembly 112 includesposition-sensitive particle detectors that are used to detect the ionsat certain predetermined positions. These position-sensitive particledetectors provide ion positional information that can be used todetermine ion mass or ion energy. In various embodiments, the portion ofthe detector surface used to detect ions is selected by electrical,magnetic, or mechanical means. For example, an electrically addressabledetector array can be used to detect ions as a function of position. Asoftware algorithm can be used to extract the position-sensitive datafrom the detector signals. Also, mechanical means can be used to controlthe effective divergence of the ions impacting the detector. Forexample, a mechanical barrier can be used to shield a portion of thedetector. In addition, ion deflectors or ion collimators can be used todeflect or to collimate the ions so that they only impact a desiredportion of the detector.

According to embodiments of the present disclosure, the ion sensor 100may be flexibly configured by applying different combinations of voltagepotentials to the housing 102, the drift tube 104, the extractorelectrode 106, the electrostatic lenses 108 and 110, and the detectorassembly 112. Exemplary configurations are shown in FIGS. 2-4.

FIG. 2 shows an ion sensor 200 having one exemplary configuration inaccordance with an embodiment of the present disclosure. The ion sensor200 may comprise substantially the same components as the ion sensor 100shown in FIG. 1. In this exemplary configuration, the housing 104 may begrounded and/or attached to a plasma chamber wall.

In some embodiments, the extractor electrode 106 is biased at a DCextractor voltage V.sub.extractor.about.−50V-0V DC for extraction ofpositive ions or V.sub.extractor.about.0V-50V DC for extraction ofnegative ions. In other embodiments, a pulsed voltage or RF signal isapplied to the extractor electrode 106 to attract or repel ions. Inanother embodiment, the extractor electrode 106 is electricallyfloating. In various embodiments, the pulsed voltage is periodic ornon-periodic and the RF signal is pulsed or CW. The pulsed and RFvoltage signals may be used to enable desorption from or deposition onthe electrode surface.

For illustration purposes, the description below will assume that onlypositive ions are sampled. It should be noted, however, that embodimentsof the present disclosure can be easily adapted or configured forsampling of negative ions. Furthermore, for simplicity, theelectrostatic lens 108 is referred to as Lens 1, the electrostatic lens110 is referred to as Lens 2, and the drift tube 104 is referred to asLens 3. Lens 1 and Lens 3 may be held at a same or similar potentialwhich may be a fixed value between, for example, −150V and −300V. Thedesired potential is determined by factors, such as the length of thedrift tube 104 and the desired ion mass resolution.

In some embodiments, Lens 1 and Lens 3 may be biased at differentpotentials (e.g., V.sub.L1=−400V-−200V and VL3=−200V). Lens 2 may bebiased at V.sub.L232 −500V-−900V. Lens 2 may be further configured as a“gate” for the drift tube 104. To open the gate, a short voltage pulse(e.g., 50-500 nanosecond) may be provided to Lens 2 to admit a packet ofions into the drift tube 104. To close the gate, a relatively largepositive potential may be imposed on Lens 2 to block positive ions fromentering the drift tube 104. According to one embodiment, Lens 2 (i.e.,gate electrode) may be normally biased with a positive voltage, e.g.+30V or above, except during the very short gating period. For example,assuming that the gate pulse width is 100 ns, and the wafer's pulsefrequency is 5,000 kHz (period=200 microsecond) and that samples areperformed once per wafer pulse, then during 99.95% of the period (199.9microsecond) the gate electrode is closed and in only 0.05% of theperiod is the gate electrode open.

When the gate pulse is synchronized with the wafer pulse, a delay may beintroduced to control where the gate pulse is open relative to the waferpulse. In this way, it is possible to sample the plasma at differentpoints in time space with a high resolution. The collective effect ofthe biases on Lenses 1-3 may be an electrostatic field that focuses theadmitted ions into a beam with a limited divergence angle. On thedetector side, the detector assembly 112 may be biased at a high voltageV.sub.MCP. The grid 124 may electrostatically shield the drift tube 104from the high voltage V.sub.MCP.

The ion sensor 200 may also be configured for time-resolved measurementsof a plasma. Many semiconductor processing plasmas are “pulsed plasmas”which alternate between on and off (afterglow) states periodically. Theplasma-on state may last 1-50% (or higher) of each cycle. The pulsedoperation can cause dynamic changes in plasma conditions and processchemistries. The sampling of the ion species may be synchronized witheither the plasma pulses or wafer bias pulse, or both if they aresynchronized. By changing the gate delay relative to the reference pulse(plasma pulses and/or wafer bias), time-resolved measurement could becarried out over the whole period.

The flight times of the ions are determined by observing the timedifference between a start signal and a stop signal. The ion modulationevent (an electrical or mechanical event) is initiated by the startsignal. The stop signal is determined by the arrival time of the ions atthe ion detector. In some embodiments, start and stop signals are usedto gate a pulse train of known frequency to give a count that isproportional to the flight time. In one specific embodiment, the startand stop signals are used to generate a voltage across a capacitor,which is then discharged at a constant rate. The discharge period isused to gate a pulse train to give an count that is proportional to theflight time. In another embodiment, the start and stop signals are usedto enable the generation of an analog pulse whose magnitude isproportional to the flight time.

The ion sensor 200 may also be configured to measure the energydistribution of the ions and/or the plasma potential. In one embodiment,an electrode or grid, such as the extractor electrode 106, theelectrostatic lens 108, and the electrostatic lens 110 is biased to be aretarding element. The number of ions transmitted as a function of theelectrode voltage is then measured. Both the energy distribution and theplasma potential can be determined from the measured data.

In another embodiment, the energy distribution of the ions is determinedby observing the spread in the arrival times of the ions at the detectorassembly 122. For example, position-sensitive particle detectors can beused to detect the ions at certain predetermined positions as describedin connection with FIG. 1. Also, the energy distribution can be measureddirectly by methods that are well known in the art. For example,calibrated particle detectors can be used to measure energy or mass byobserving the amplitude of signals generated by the detectors.

In yet other embodiments, the drift tube 104 is configured to performthe function of an energy analyzer. There are numerous ways to configurethe drift tube 104 as an energy analyzer. For example, in oneembodiment, the drift tube 104 is formed in a curved shape and includeselectrostatic or magnetic deflection elements. The shape of the drifttube 104 is chosen so that ions with different energies bend withdifferent angles. In another embodiment, the drift tube 104 includes aparallel-plate energy analyzer as part of the drift path to the detectorassembly 112. For example, the energy analyzer can be a 45 degree typeenergy analyzer. In another embodiment, the drift tube 104 includes acylindrical mirror or a spherical energy analyzer as part of the driftpath to the detector assembly 112. In another embodiment, one or moregrids are placed in the ion path to configure the drift tube 104 as aretarding potential analyzer. Also, in another embodiment, the drifttube can include a RF quadrupole or one or more permanent orelectromagnets with the ability to differentiate between ions ofdifferent energies by adjusting the RF or DC voltages. The positions ofthe permanent magnets can be adjustable.

FIG. 2 a shows an ion sensor 200A having an energy analyzer 114 inaccordance with an embodiment of the present disclosure. The energyanalyzer 114 is positioned between the drift tube 104 and the detectorassembly 112. The energy analyzer 114 can be used to select ions withina desired energy range.

FIG. 3 shows an ion sensor 300 having another exemplary configuration inaccordance with an embodiment of the present disclosure. The ion sensor300 may comprise substantially the same components as the ion sensor 100shown in FIG. 1. However, in this exemplary configuration, the extractorelectrode 106 receives a RF (1-300 MHz, typically 13.56 MHz) bias. TheRF biased extractor electrode 106 may serve dual functions. That is, theextractor electrode 106 may extract ions and also may remove depositsfrom the extractor aperture in a deposition-dominant environment.

Many semiconductor manufacturing processes are carried out in adeposition-dominant environment wherein thin-film materials aredeposited in a plasma chamber. If a thick insulating film blocks theextractor aperture, a DC bias on the extractor electrode 106 may nolonger be effective. A RF bias may help sputter clean the extractoraperture to remove the deposited materials. Thus, a RF bias may providethe ion sensor 300 with a “self-cleaning” capability. For ionextraction, the RF bias may have a negative average potential (or RFself-bias) between −50V and 0V, and a peak-to-peak value of 0V-100V. Forsputter cleaning purposes, the RF self-bias may be larger than asputtering threshold and the peak-to-peak value may be 100-1000V orhigher.

FIG. 4 shows an ion sensor 400 having yet another exemplaryconfiguration in accordance with an embodiment of the presentdisclosure. The ion sensor 400 may comprise substantially the samecomponents as the ion sensor 100 shown in FIG. 1. However, in thisexemplary configuration the extractor electrode 106 also functions as agate. A gate pulse may be provided to the extractor electrode 106 topull a packet of ions into the ion sensor 400. Lens 2 may be providedwith a DC bias to focus the ion beam.

Ion sensors in accordance with embodiments of the present disclosure maybe installed in a number of ways for flexible detection of ion speciesin a plasma chamber. Exemplary installation options are shown in FIGS.5-7.

FIG. 5 shows one installation option for an ion sensor 508 in accordancewith an embodiment of the present disclosure. An over-simplified plasmachamber 500 is shown with a platen/cathode 502 holding a wafer 504. Ananode 506 is positioned above the platen/cathode 502. The anode 506 isnot necessarily grounded but may be biased at a voltage, for example,that is between −1 kV and +1 kV (other voltages are possible). An anodeshaft 507 may enable movement of the anode 506 in the verticaldirection. A plasma 50 may be generated between the anode 506 and theplaten/cathode 502, either by cathode bias voltages or by additionalplasma sources.

For ion implantation applications, negative voltage pulses may beapplied to the platen 502 to draw positive ions towards the wafer 504.For negative ions, positive voltage pulses may be used. The ion sensor508 may be installed in a sidewall of the plasma chamber 500. Theinstallation may be through a view port or similar mechanism. The ionsensor 508 may have its extractor tip extended sideway into or near anedge of the plasma 50. The extractor tip may be positioned on a movablemount. Due to the small size of the extractor tip, it may be inserteddeep into the plasma 50 without significantly disturbing the plasma 50.

FIG. 6 shows another installation option for an ion sensor in accordancewith an embodiment of the present disclosure. In this installationoption, instead of or in addition to the ion sensor 508 installed in thesidewall, an ion sensor 602 may be installed on the anode side. That is,the ion sensor 602 may be positioned through the anode 506 and may bevertically oriented with its extractor tip pointing downwards at or intothe plasma 50. The ion sensor 602 may be electrically connected with theanode 506. The ion sensor 602 or its extractor tip may move up and downindependent from the anode 506 to sample ions at different spatialpoints in the plasma chamber 500. Alternatively, the ion sensor 602 orits extractor tip may move up and down together with the anode 506 forin-situ diagnostic of different process conditions. The horizontallypositioned ion sensor 508 may be similarly actuated for a spatialmeasurement of the plasma 50.

FIGS. 6 a-c show different examples of plasma processing chambers inaccordance with embodiments of the present disclosure.

In FIG. 6 a, there is shown a plasma chamber 600A. An ion sensor 602 maybe installed through an anode 506. A bellows seal 604 may accommodateinstallation and movement of the ion sensor 602 through the chamberwall. The plasma 50 may be generated by negatively pulsed voltagesapplied on the wafer 504 or the platen 502. According to one embodiment,extraction of ions from the plasma 50 into the ion sensor 602 may besynchronized with the plasma generation, and therefore the voltagepulses on the wafer 504.

In FIG. 6 b, there is shown a plasma chamber 600B. The plasma generationtechnique shown in FIG. 6 b is different from the plasma generationtechnique shown in FIG. 6 a. The plasma chamber 600B may have one ormore external plasma sources, such as, for example, ICP or Heliconplasma sources. For example, in one embodiment, a RF power supply 605and a RF matching unit 607 is coupled to RF coils 606. Throughdielectric interfaces 609, the RF coils 606 may supply RF electricalpower into the plasma chamber 600B. The platen 502 may be biased tocontrol the energy of ions that impact the wafer 504.

In FIG. 6 c, there is shown a plasma chamber 600C, wherein anotherplasma generation technique is employed. One or more microwave sourcesmay be coupled to the plasma chamber 600C to supply the power togenerate and sustain the plasma 50. For example, a microwave supply 611may be coupled to a microwave cavity 608 via a tuner 613 and a waveguideor cable. The microwave power supplied to the microwave cavity 608 maygenerate a “source plasma” therein, whereupon the source plasma maydiffuse into the plasma chamber 600C to produce the plasma 50.Alternatively, the plasma 50 may be generated directly inside the plasmachamber 600C by coupling microwave power via the cavity 608 and into theplasma chamber 600C.

FIG. 7 shows yet another installation option for an ion sensor inaccordance with an embodiment of the present disclosure. In thisinstallation option, one or more ion sensors 702 may be installed on thecathode side. That is, an ion sensor 702 may be positioned verticallythrough the platen/cathode 502 with the extractor tip positioned next tothe wafer 504. The installation location for the ion sensor 702 may be(or near) where a Faraday cup would be typically located. Since theextractor tip is pointing up at the plasma 50, the ion sensor 702 andthe wafer 504 may share a same or similar vantage point with respect tothe plasma 50. As a result, the ion sensor 702 may “see” the samecomposition and dose of ions as what the wafer 504 sees, which mayfacilitate a more accurate control of plasma processing of the wafer504. In a plasma doping (PLAD) system, for example, the ion sensor 702may be able to directly detect what ions are implanted into the wafer504. If desired, the ion sensor 702 may also be moved up and down for aspatial measurement.

FIGS. 7 a-b show exemplary systems for employing ion sensors for processcontrol in accordance with embodiments of the present disclosure.

FIG. 7 a shows an ion sensor 702 being installed next to the wafer 504.A Faraday cup 704 may be installed on the other side of the wafer 504 orthe Faraday cup 704 may partially surround the wafer 504. Both the ionsensor 702 and the Faraday cup 704 face up to a plasma (not shown) asthe wafer 504. The ion sensor 702 may be coupled to a unit 706 thatcalculates an in-situ ion composition based on detection data receivedfrom the ion sensor 702. The Faraday cup 704 may be coupled to a chargecounter 708 that calculates a total ion dose based on the Faraday cupcurrent. The ion composition information and the ion dose data may beinput to a dose correction module 710. In addition, the ion compositiondata may be input to a system controller 712 for further processcontrol.

FIG. 7 b shows two or more ion sensors 702 being installed around thewafer 504. The in-situ ion composition data from these ion sensors 702may be input to the system controller 712. Output functions 714 of thesystem controller 712 may include, but are not limited to, ion dosecorrection, dose uniformity control, plasma chamber conditioning, and/orprocess fault detection. In embodiments where the sensor is installed ina platen around the wafer 504, the drift tube 104 (FIG. 1) may either beisolated from the platen or be at the platen potential.

For the cathode-side (or wafer-side) measurement of the plasma 50, theion sensor 702 may be configured differently from those shown in FIGS.2-4. One example is shown in FIG. 8.

FIG. 8 shows an exemplary ion sensor 800 in accordance with anembodiment of the present disclosure. The ion sensor 800 may comprisesubstantially the same components as the ion sensor 200 shown in FIG. 2,except that the extractor electrode 106 is removed. The housing apertureat the extractor side may be shrunk to approximately 10-500 microns(preferably 50-200 microns). The housing 102 may be biased at a same orsimilar potential (e.g., 0V-−0 kV) as the wafer 504. Lens 1, Lens 3(drift tube 104), and detector assembly 112 may also be biased at a sameor similar potential. Lens 2 may function as a gate to pulse ion packetsinto the drift tube 104.

At this point it should be noted that the ion sensors in accordance withthe present disclosure as described above typically involves theprocessing of input data and the generation of output data to someextent. In various embodiments, this input data processing and outputdata generation may be implemented in hardware or software. For example,specific electronic components may be employed in a plasma processingtool or similar or related circuitry for implementing the functionsassociated with in-situ monitoring of ion species in accordance with thepresent disclosure as described above. Alternatively, one or moreprocessors operating in accordance with stored instructions mayimplement the functions associated with in-situ monitoring of ionspecies in accordance with the present disclosure as described above. Ifsuch is the case, it is within the scope of the present disclosure thatsuch instructions may be stored on one or more processor readablecarriers (e.g., a magnetic disk), or transmitted to one or moreprocessors via one or more signals.

In one embodiment, the dose or plasma conditions may be changed as partof an automated or semi-automated closed control loop that includes acontroller or computer and electronic instrumentation that is responsiveto data obtained from TOF sensor according to the present invention. TheData obtained from the detector assembly 112 can include the absolute orrelative magnitudes of various portions of the measured TOF spectra. Thedata from the detector assembly 112 can also include the shape of thetime-of-flight peaks, such as changes in FWHM. The data from thedetector assembly 112 can also include the presence or absence of minor(contaminant) peaks, the energy distribution, and the mass distribution.

The data from the TOF sensor can be used to detect fault conditions,such as gas impurities, residual contaminants, and malfunctions ofequipment used to control the plasma. The plasma conditions can bechanged in response to the data by adjusting the TOF sensor's operatingparameters, such as gas flow, gas mixture, pressure, RF power, RFfrequency, implant voltage, duty cycle, or other plasma relatedparameter.

The present disclosure is not to be limited in scope by the specificembodiments described herein. Indeed, other various embodiments of andmodifications to the present disclosure, in addition to those describedherein, will be apparent to those of ordinary skill in the art from theforegoing description and accompanying drawings. Thus, such otherembodiments and modifications are intended to fall within the scope ofthe present disclosure. Further, although the particular implementationin a particular environment for a particular purpose, those of ordinaryskill in the art will recognize that its usefulness is not limitedthereto and that the present disclosure may be beneficially implementedin any number of environments for any number of purposes. Accordingly,the claims set forth below should be construed in view of the fullbreadth and spirit of the present disclosure as described herein.

1. A time-of-flight ion sensor for monitoring ion species in a plasma,comprising: a drift tube disposed near an edge of the plasma; anextractor electrode and a plurality of electrostatic lenses disposed ata first end of the drift tube, wherein the extractor electrode is biasedto attract ions from a plasma in the plasma chamber, and wherein theplurality of electrostatic lenses cause at least one portion of theattracted ions to enter the drift tube and drift towards a second end ofthe drift tube within a limited divergence angle; an ion detectordisposed at the second end of the drift tube, wherein the ion detectordetects arrival times associated with the at least one portion of theattracted ions; and a housing for the extractor, the plurality ofelectrostatic lenses, the drift tube, and the ion detector, wherein thehousing accommodates differential pumping between the ion sensor and theplasma chamber.
 2. The ion sensor according to claim 1, wherein theextractor electrode is biased at a plurality of potentials that performattraction and repulsion of ions from the plasma.
 3. The ion sensoraccording to claim 1, wherein the extractor electrode is floating. 4.The ion sensor according to claim 1, wherein the extractor electrode isRF biased.
 5. The ion sensor according to claim 4, wherein the extractorelectrode is RF biased to cause one or more deposited materials on theextractor electrode to be sputtered.
 6. A time-of-flight ion sensor formonitoring ion species in a plasma, the time-of-flight ion sensorcomprising: a housing; a drift tube that is positioned in the housing;an extractor electrode positioned in the housing at a first end of thedrift tube, the extractor electrode being biased at a first potential toattract ions from the plasma and a second potential to repel ions fromthe extractor electrode; a plurality of electrodes that are positionedat a first end of the drift tube proximate to the extractor electrode,the plurality of electrodes being biased so as to cause at least aportion of the attracted ions to enter the drift tube and to drifttowards a second end of the drift tube; and an ion detector that ispositioned proximate to the second end of the drift tube, the iondetector detecting arrival times associated with the at least a portionof the attracted ions.
 7. A method for monitoring ion species in aplasma, the method comprising: applying a first bias voltage and asecond bias voltage to an extractor electrode, the first and second biasvoltage performing at least one of attraction and repulsion of ions;applying a voltage signal to at least one of a plurality of electrodesthat are positioned proximate to the extractor electrode, the voltagesignal causing at least a portion of the attracted ions to drift thougha drift tube; detecting arrival times at an end of the drift tube, thearrival times being associated with the at least a portion of attractedions; and determining information about the plasma from the arrivaltimes.